Cases of Measures against Vibration Problems
We would like to introduce some examples of vibration obstacles that Tokkyokiki has solved.
Even if the phenomenon of vibration is similar, the measures taken will differ depending on the site's environment and allowable values.
No matter what the issue is, Tokkyokiki thoroughly investigates the "cause" and resolve the "obstacle" to create optimal environments.
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Case List
998
Advanced vibration control for the high speed stage
Enhancement of equipment throughput directly con...
0211
Countermeasure by Active Vibration Isolation for the precision equipment with moving stage
Fine process equipment (including inspection and...
0130
Countermeasure against Alternating Current (AC) Magnetic Field Interferance for Semiconductor Manufacturing Equipment
Observation images of SEM based equipment used i...
0165
Passive and Active Vibration Isolation countermeasure to precision equipment
Quiet vibration environment is essential for mic...
J7
Active Vibration Isolation countermeasure to LCD panel inspection tool
When Tokkyokiki measured floor vibration environ...
095
Measurement of ultra-low vibration ground
073
Measures against Solid Noise (Noise) of Outdoor Air-Conditioning Units
When the air conditioner outdoor unit installed ...
057
Example of Noise Measures by Vibration Insulation of Large-Diameter Vertical Piping
Solid noise was generated in the vicinity of th...
031
Measures against Solid Noise of Transformers
A solid noise was generated due to the energizat...
029
Measures against Magnetic Field Obstruction of Scanning Electron Microscopes (SEM)
For the SEM installed in the demo room in the of...