Ultra-precision Equipment

Lithography Equipment /Exposure Equipment/Inspection Equipment

• Active Unit
• Large Size Passive Vibration Isolation Table

Floor Vibrations

• High Rigidity Pedestal
• Vibration Control Device For Vertical Direction
• Seismic Isolation Device

Equipment Machine Room Measures

• Vibration isolator for HVAC equipment

Precision Equipment

• Desktop Active Vibration Isolation Table
• Desktop Passive Vibration Isolation Table
• Desk Type Passive Vibration Isolation Table
• Passive Unit
• Seismic Isolation Device

Electron Microscopes

• Active Magnetic Field Canceller
• Active Vibration Isolation Table With Linear Motor Actuator (Αl)