Desk Type Vibration Isolation Table
EHS / DHS / DAS / SRD / SVD
Manufacturing, inspection, and measurement in the ultra-precision processing fields, which includes the semiconductor industry, are becoming increasingly precise to the level of nanometers and angstroms. Our series of OS float desks accurately captures the needs of these times and provides an isolation space for ultra-fine vibration.
We boast a rich lineup able to accommodate the weight and size of the inspection equipment used with semiconductors and liquid crystal substrates.
A simple design made to accommodate the production inspection line.
It features a beautifully configured system with a number of options.
EHS / DHS Specification
Desk Type Vibration Isolation Table EHS
High-performance vibration isolation desk for ultra-precision inspection/measurement equipment
EHS-68 (with lower shelf)
| Model | EHS-68 | EHS-78 | EHS-87 | EHS-107 |
|---|---|---|---|---|
| External dimensions of vibration isolation table | 600×800 ×750 |
700×800 ×750 |
800×700 ×750 |
1,000×700 ×750 |
| Weight (kg) | 170 | 190 | 190 | 220 |
| Loading weight limit (kg) | 120 | |||
| Vibration isolation method | Air spring and swing ball support system (PAT .P/USP) | |||
| Natural frequency (Hz) | Vertical direction 1.6 to 2.2 Horizontal direction 1.2 to 1.8 | |||
| Leveling | Automatic leveling system with mechanical valve: Supplied pressure: 0.4Mpa | |||
| Float | SUS304 polished finish | |||
| Options | Work cover, earthquake-resistant fixing bracket, lower shelf | |||
| Other | Can be used in a cleanroom (with centralized exhaust mechanism and anti-static ground functionality) RoHS compliant |
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Desk Type Vibration Isolation Table DHS
The DHS series is a model with a work cover set on the EHS series.You can work without worrying about touching the float.
DHS-68(with lower shelf)
| Model | DHS-68 | DHS-78 | DHS-87 | DHS-107 |
|---|---|---|---|---|
| External dimensions of vibration isolation table (W x D x Hmm) |
650×850 ×750 |
750×850 ×750 |
850×750 ×750 |
1,050×750 ×750 |
| Weight (kg) | 175 | 195 | 195 | 225 |
| Loading weight limit (kg) | 120 | |||
| Vibration isolation method | Air spring and swing ball support system (PAT .P/USP) | |||
| Natural frequency (Hz) | Vertical direction 1.6 to 2.2 Horizontal direction 1.2 to 1.8 | |||
| Leveling | Automatic leveling system with mechanical valve: Supplied pressure: 0.4Mpa | |||
| Float | SUS304 polished finish | |||
| Options | Seismic fixing bracket, lower shelf | |||
| Other | Can be used in a cleanroom (with centralized exhaust mechanism and anti-static ground functionality) RoHS compliant |
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EHS / DHS Feature
- Vibration transmission characteristics: Stable vibration transmission characteristics that suppress the generation of modes up to 100Hz, despite low eigenvalues.
- Uses an "SBM mechanism" (PAT.P/USP) as the horizontal direction isolator. Achieved low eigenvalues horizontally. It is now possible to keep the horizontal natural frequency constant regardless of the weight of the mounted equipment.
- We have commercialized a new type of air spring, the swing ball (SBM) mechanism, which is a unique vibration isolation technology cultivated from our active vibration isolation. By adopting this SBM mechanism, we are now able to suppress the rolling mode, which was difficult with conventional air springs. In addition to the optimally designed gantry unit, it is now possible to reliably isolate vibrations over a wide range of frequencies and maximize the performance of the onboard equipment.
New type air spring
DAS / SRD / SVD Specification
Desk Type Vibration Isolation Table DAS
Supports large loads such as optical microscopes/roughness meters
DAS-68 (with lower shelf)
| Model | DAS-68 | DAS-78 | DAS-87 | DAS-107 |
|---|---|---|---|---|
| External dimensions of vibration isolation table (W x D x Hmm) |
650×850 ×750 |
750×850 ×750 |
850×750 ×750 |
1,050×750 ×750 |
| Weight (kg) | 180 | 200 | 200 | 230 |
| Loading weight limit (kg) | 200 | |||
| Vibration isolation method | Air spring | |||
| Natural frequency (Hz) | Vertical and horizontal 2.0 to 3.0 | |||
| Leveling | Automatic leveling system with mechanical valve: Supplied pressure: 0.4Mpa | |||
| Float | SUS304 polished finish | |||
| Options | Seismic fixing bracket, lower shelf | |||
| Other | Can be used in a cleanroom (with centralized exhaust mechanism and anti-static ground functionality) RoHS compliant |
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Desk Type Vibration Isolation Table SRD / SVD
Cleanly equipped with measurement microscope/roughness meter, etc.
SVDA(ウイング、サイドデス
ク(ED)、モニター台、マウ
ス/キーボード台付き)
| Model | SRDA | SVDA | SRDC | SVDC | SRDR |
|---|---|---|---|---|---|
| External dimensions of vibration isolation table (W x D x Hmm) |
590×720 ×715 |
770×720 ×715 |
590×720 ×715 |
770×720 ×715 |
590×720 ×715 |
| Weight (kg) | 70 | 105 | 70 | 105 | 70 |
| Loading weight limit (kg) | 120 | 200 | 120 | 200 | 45 |
| Vibration isolation method | Air spring | Special rubber spring pad | |||
| Natural frequency (Hz) | Vertical and horizontal 2.0 to 3.0 | Vertical and horizontal 8.0 to 12.0 | |||
| Leveling | Automatic leveling system with mechanical valve: Supplied pressure: 0.4Mpa | Manual adjustment of hand pump supply | Special rubber spring pad | ||
| Float | SPCC (melamine resin coating) | ||||
| Options | Side wing, side desk (ED) ED, monitor stand, mouse/keyboard stand | ||||
Regarding the use of desk type vibration isolation tables: If the height of the center of gravity of the mounted device exceeds half the length of the shorter side of the isolator table, please contact us.
