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Advanced vibration control for the high speed stage

Category
  • Type of equipment/device
    • Air conditioning/Sanitary equipment
    • Electrical equipment
    • Buildings/Structures
    • Precision equipment
    • Vibration-sensitive equipment
  • Vibration obstacle phenomena
    • Vibration
    • Noise
    • Magnetic fields
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Tag
Countermeasure by Active Vibration Isolation for the precision equipment with moving stage
Enhancement of equipment throughput directly contribute better productivity of the factory. For this objective, Active Vibration Isolation system is required to minimize the settling time.
Existing Active Vibration Isolation system has already been equipped with vibration control function to optimize the stage movement called stage feed-forward (SFF) however the target specification becomes higher in accordance with the migration to the high speed stage.
This time we will propose the countermeasure to shorten the settling time for the high speed (2G acceleration) stage.

Enhancement of the vibration control performance for Active Vibration Isolation system

We have successfully enhanced vibration control performance for the high-speed stage with maintaining normal vibration isolation performance.
By strengthening the actuator itself, we have confirmed to reduce the maximum displacement to 1/5 vertically and 3/4 horizontally compared with ordinary active control for high-speed stage (SFF).
In addition, with using strengthened actuator, the displacement at the point of 130msec after the complete stgae stop has been reduced to 1/4 level both vertically and holizontally.

  • Fig1. Max. displacement during stage move

  • Fig2. Displacement after stage stop (130msec)

Reduction of settling time

We have also confirmed the settling time reduction of active control with using strengthened actuator. It has been shortened to approximately 1/80 level compared with ordinary active control.

  • Fig3. Settling Time after Stage Stop

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