Nanotechnology
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VIBRATION ISOLATION DEVICE Pneumatic Active Vibration Isolation Unit
The α series exhibits outstanding effectiveness in its maintenance of posture as well as in its vibration isolation and damping abilities. It can also handle heavy loads by supporting 6 , 8 or multiple points.
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Active Vibration Isolation Table for Electron Microscope
αL4X-911R1A low height type vibration isolation table ideal for electron microscopes.
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Desktop Active Vibration Isolation Table δTA
Compact active vibration isolation device that does not require air. It exhibits excellent vibration isolation performance at both low and high frequencies.
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Desk Type Vibration Isolation Table
DHS / DASA rich lineup able to accommodate the weight and size of the inspection equipment used with semiconductors and liquid crystal substrates.
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Desktop Vibration Isolation Table
TAP / TAPCThe thinnest possible design enables the operator without noticing any work environment changes. Thanks to smart, simple structure and wide variety of product line, it can easily be adjusted to loading tool’s size and weight.
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Large Size Vibration Isolation Table
This device was designed to be ideal for the installation environments of electron microscopes and other kinds of exposure equipment.
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Passive Vibration Isolation Unit
UAO SeriesBeing the same size as our company's active unit, it is able to be switched out for that unit.
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High Rigidity Pedestal
A highly rigid pedestal that separates the precision equipment installation area from its surroundings. It can conduct design, construction, and verification measurements each time according to the installation location and equipment installed.
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Active Magnetic Field Canceller
AMC-331If magnetic field fluctuations occur, they will adversely affect electron beam application devices such as electron microscopes. The AMC-331 is a system that suppresses magnetic field fluctuations by detecting magnetic field fluctuations with a high-sensitivity magnetic field sensor and using a Helmholtz coil to generate magnetic fields of opposite phases.