Desktop active vibration isolation table δTA
Compact active vibration isolation device that does not require air.
It exhibits excellent vibration isolation performance at both low and high frequencies.
Features
- Control with 6 degrees of freedom active in the vertical direction (Z), 2 horizontal directions (X, Y), and each rotation direction.
- Exhibits a stable vibration isolation effect regardless of the weight of the mounted device (average load of 0 to 100 kg) and the position of the center of gravity.
- Equipped with an auto-leveling mechanism that senses the position of the center of gravity of the mounted equipment at startup and automatically adjusts the optimum control balance.
- Supports cleanroom use by excluding components that could generate dust.
- This panel uses a VFD (fluorescent display tube) that has a wide viewing angle and is easy to see. Additionally, it has an ON/OFF light source function for use in dark rooms.
Usage
- AFM (atomic force microscope), SPM (scanning probe microscope).
- Laser microscope, laser interferometer.
- Microscopic hardness tester.
- Other various precision measuring instruments.
Vibration transfer characteristics
Excellent vibration isolation effect even with no load and a high center of gravity.
Specifications
| Model | δTA-56 |
|---|---|
| Control Method | 6-DOF feedback control |
| External dimensions of vibration isolation table (W x D x H mm) | 500 × 600 × 92 |
| Surface plate dimensions (W × D mm) | 500 × 600 |
| Product mass (kg) | 31 |
| Loading weight limit (kg) | 100 |
| Power supply | Single-phase AC100-200V (50/60Hz) |
