Low Hieght Active Vibration Isolation System for Scanning Electron Microscope (SEM/FIB) αL4X-911R2
Realize optimal vibration environment
from the low frequency range of 0.5Hz.
Features
Equipped with self check function and enables auto tuning
Showing real time vibration status on the front LCD panel
Specifications
| External dimensions ( W x D x Hmm ) |
02 ( W ) × 1102 ( D ) × 152 ( H ) ( Deflating ) |
|---|---|
| Product mass ( kg ) | 320 |
| Vibration isolation mechanism | Diaphragm air spring |
| Maximum payload | 1000 ( Evenly load ) |
| Control Method | 6 degrees of freedom feedback + ground feedforward control |
