Large Size Vibration Isolation Table

Features
- Optimal setting of balance between vibration isolation and damping
- Support element: Air spring
This excellent vibration isolation material can obtain a lower natural frequency than vibration isolation rubber and metal coil springs, and blocks minute vibrations.
A wide range of loads can be accommodated by changing the internal pressure.
*Support element: Factor that determines vibration isolation performance vertically

Air spring
- Orifice
A narrow flow path is opened between the air spring and its supporting air column (auxiliary air tank) to obtain damping characteristics via air flow resistance.

Orifice
- Damping element: Oil damper
The viscous resistance of oil is used for large damping force and large displacement.
*Damping element: Appropriate damping is applied to suppress excessive response and the amplification of resonance points that occur when operating the vibration isolation device.

Oil damper
- Leveling: Leveling sensor
Achievess high speed and precise position control.
*Leveling: Detects the height of the vibration isolation device and constantly controls it at a constant height even if the mounted load or the position of the center of gravity changes.

Leveling sensor
