Low Height Active Vibration Isolation System for Scanning Electron Microscope (SEM/FIB) αL4X-911R2
Realize optimal vibration environment
from the low frequency range of 0.5Hz.
Features
Equipped with self check function and enables auto tuning
Specifications
| External dimensions ( W x D x Hmm ) |
902 × 1102 × 152 ( Deflating ) |
|---|---|
| Product mass ( kg ) | 320 |
| Vibration isolation mechanism | Diaphragm air spring |
| Maximum payload | 1000 ( Evenly load ) |
| Control Method | 6 degrees of freedom feedback + ground feedforward control |
